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Spatial molecular layer deposition of hybrid films: Challenges and opportunities for upscaling - PhDData

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Spatial molecular layer deposition of hybrid films: Challenges and opportunities for upscaling

The thesis was published by Jain, Hardik Shantilal, in April 2023, Technische Universiteit Eindhoven.

Abstract:

The full thesis can be downloaded at :
https://pure.tue.nl/ws/files/287383626/20230404_Jain_hf.pdf
https://research.tue.nl/nl/publications/3fd5d145-7dac-43b0-a538-7a8b984e9395

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